| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L61-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-06 |
| filingDate |
2020-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed1b928bbb67faef82205a2cb3308c53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40c8c84386417a03f710afa3361ce84c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_955d038553434dd7285716fd6538e556 |
| publicationDate |
2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210106812-A |
| titleOfInvention |
A hard mask composition |
| abstract |
The present invention relates to a composition for a hard mask comprising a polymer including a repeating unit having a specific structure. |
| priorityDate |
2020-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |