http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210103765-A

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N1-04
filingDate 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_600e1ff75dda27b3a458eb2d601c116b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fbf26a6a583c798b3bc62a06d511f3b
publicationDate 2021-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210103765-A
titleOfInvention Surface treatment method of triboelectric nanogenerator substrate and triboelectric nanogenerator manufactured using the same
abstract A method for surface treatment of a substrate for a triboelectric nanogenerator for treating the surface of a substrate for a triboelectric nanogenerator (TENG), which is charged negatively or positively by triboelectric charging, and a triboelectric nanogenerator manufactured using the same it's about A surface treatment apparatus for a substrate for a triboelectric nanogenerator includes: a chamber having a reaction space formed therein; a support provided in the chamber and supporting the substrate; a gas supply unit providing a reaction gas for forming plasma into the chamber; and a neutral beam generator extracting ions from the plasma, converting the ions into a neutral beam, and providing the neutral beam to the substrate to form a nanopattern on the surface of the substrate.
priorityDate 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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