http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210103765-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55a854abe5a37b075d9a25a1cfcb46eb |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-305 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N1-04 |
filingDate | 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_600e1ff75dda27b3a458eb2d601c116b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fbf26a6a583c798b3bc62a06d511f3b |
publicationDate | 2021-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20210103765-A |
titleOfInvention | Surface treatment method of triboelectric nanogenerator substrate and triboelectric nanogenerator manufactured using the same |
abstract | A method for surface treatment of a substrate for a triboelectric nanogenerator for treating the surface of a substrate for a triboelectric nanogenerator (TENG), which is charged negatively or positively by triboelectric charging, and a triboelectric nanogenerator manufactured using the same it's about A surface treatment apparatus for a substrate for a triboelectric nanogenerator includes: a chamber having a reaction space formed therein; a support provided in the chamber and supporting the substrate; a gas supply unit providing a reaction gas for forming plasma into the chamber; and a neutral beam generator extracting ions from the plasma, converting the ions into a neutral beam, and providing the neutral beam to the substrate to form a nanopattern on the surface of the substrate. |
priorityDate | 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.