| abstract |
The optical inspection apparatus includes a first filter having a plurality of discontinuous transmission bands, a first beam splitter that reflects the first light emitted from the first filter and transmits it to the inspection object, and the first light is transmitted by the inspection object a second beam splitter for splitting the reflected second light into a first split light and a second split light; a second filter to which the first split light is incident and having a transmission band different from that of the first filter; and a fluorescence microscope for generating a fluorescence image from the third light emitted from the second filter, and a first imaging module for generating an image from the second split light. |