Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fda353b84ebf303bfc237d8bd8e22966 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68381 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02W30-62 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
filingDate |
2019-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2bb3cb559be3aa92e4c340d470cc040 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5772e77cedf39d5dd28775ff557a2099 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b33dff4ecb45cb2faa0f687a3afb00b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5430cc60dfc62e522cafd53c8025d60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b5ce8de7c9583b5d4ee468fc423bcb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f11770c497b0d8a85f766ff4110dcc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94265c39bc958746f9a003f9924a2b14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba6048709f6ef97f7896ad435d197ec7 |
publicationDate |
2021-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20210095628-A |
titleOfInvention |
Method for manufacturing a semiconductor device, a light-absorbing laminate, and a laminate for temporarily fixing |
abstract |
The process of processing the semiconductor member temporarily fixed through the temporarily fixing material layer with respect to the supporting member, and irradiating incoherent light from the supporting member side with respect to the temporarily fixing laminate, thereby separating the semiconductor member from the supporting member. A method of manufacturing a semiconductor device provided in this order is disclosed. Part or all of the temporarily fixed material layer is a light absorption layer that absorbs light to generate heat. The transmittance of the support member with respect to the incoherent light is 90% or more. The transmittance of the temporary fixing material layer with respect to the incoherent light is 3.1% or less. |
priorityDate |
2018-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |