| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1894637205a6363e54f3117d66b6fa14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2019-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6c8b1ac19124efe23df444f16f3e79d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f31a70f3eed65ff5ceedd83da313737a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a2dbdd3716df025637ff053fb19789d |
| publicationDate |
2021-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210078765-A |
| titleOfInvention |
Slurry composition for oxide film polishing |
| abstract |
The present invention relates to a slurry composition for polishing an oxide film, and an aspect of the present invention includes: abrasive particles; water-soluble polymers; and an ammonium salt; provides a polishing slurry composition comprising. |
| priorityDate |
2019-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |