| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate |
2019-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_290ae6063b46ed3e5a4c7023fb73608e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ed2c36bbbaabfcc12f40a52b1d620f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fdb7c059d171663b9968d2f9e218c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9822449771fd2876ee738b667e25483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ee6bfcf7ab633a4b275f37586af38fe |
| publicationDate |
2021-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210063349-A |
| titleOfInvention |
Apparatus and method for controlling introduction of EUV target material into EUV chamber |
| abstract |
An apparatus and method for controlling introduction of an EUV target material into an EUV chamber are disclosed, wherein the EUV target material is used for plasma formation within the EUV chamber, such as during a period when a dispenser of EUV material is first being started or being adjusted. EUV target material is selectively prevented from entering the EUV chamber when not needed. |
| priorityDate |
2018-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |