| abstract |
An in situ protective coating is deposited on the surfaces of the chamber components of the reaction chamber at high temperatures. In situ protective coatings are deposited at temperatures above about 200° C. to provide high quality coatings that are resistant to certain types of halogen chemicals, such as fluorine-based species, chlorine-based species, bromine-based species or iodine-based species. May be. Subsequent coatings or layers may be deposited on the in-situ protective coating having different etch selectivities than the underlying in-situ protective coating. An in situ protective coating may be deposited throughout the reaction chamber to be deposited on the surfaces of the chamber components, including chamber walls. |