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publicationDate 2021-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210059818-A
titleOfInvention Apparatus for stealth dicing and method thereof
abstract Laser light source; A linear focusing lens that linearly condenses the beam emitted from the laser light source; Including, wherein the linear focusing lens: a horizontal plane; And an inclined surface forming an inclination angle α with the horizontal surface. Wherein α is a refractive index R of the linear focusing lens and 34.97R 2 -146.6R+162.5 <α <52.45R 2 -207.6R+224.9.
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