| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4b95b779cec78ee0a79a63947fa8a7ef |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 |
| filingDate |
2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43ae08b46429b6fc7fd309f17937c6ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ed49d3f31cbc3d52bb41ae767714b6a |
| publicationDate |
2021-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210058370-A |
| titleOfInvention |
Tungsten Compound, Method for Preparation of the Same, and Tungsten-Containing Thin Film, Method of Manufacturing the Same |
| abstract |
The present invention relates to a tungsten compound, a method for manufacturing the same, and a tungsten-containing thin film using the tungsten compound and a method for manufacturing the tungsten compound, which can produce a high quality tungsten-containing thin film with high durability and purity at low cost, It relates to a tungsten-containing thin film using the tungsten compound and a method of manufacturing the same. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023282615-A1 |
| priorityDate |
2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |