http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210045782-A

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filingDate 2019-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be97bb35d740c24e7f6ac604acca53b2
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publicationDate 2021-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210045782-A
titleOfInvention Liquid chip for electron microscope Comprising Electrode
abstract The present invention relates to a liquid chip for an electron microscope including a lower chip, an upper chip, and a channel space for supplying a liquid sample, by attaching a transparent thin film made of graphene material having excellent expansion resistance to a plurality of holes formed in the channel space. In addition, since the thickness of the support, which does not play the role of the transmission window, can be increased more than before, there is an effect of supplying a liquid sample more stably while minimizing the loss of spatial resolution and suppressing the expansion of the transmission window. To this end, the present invention includes: a lower substrate having a lower cavity formed thereon; A lower support disposed on an upper surface of the lower substrate and having a plurality of lower holes formed in the lower cavity region; Spacers positioned at both ends of the lower support body of the lower hole; And a lower permeable thin film portion attached to the lower support to cover the lower hole, wherein the upper chip includes an upper substrate having an upper cavity formed thereon; An upper support disposed on an upper surface of the upper substrate and having a plurality of upper holes formed in the upper cavity region; And an upper permeable thin film portion having a constant expansion resistance attached to the upper support to cover the plurality of upper holes, wherein the channel space portion includes an upper support disposed on the upper surface of the upper substrate on the spacer of the lower chip. It is formed, and the permeable thin film part is characterized in that it is located inside the channel space part.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022077989-A
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Total number of triples: 37.