| abstract |
An object of the present invention is to provide a charged particle beam device capable of clearly discriminating the material and shape of the sample surface even when the layer formed on the sample surface has a thin film thickness and thus it is difficult to obtain an observational contrast. As a means for solving such a problem, the charged particle beam device according to the present invention changes the signal amount of the discharged charged particles by irradiating a sample with light, by irradiating a plurality of light irradiation conditions, and changing the According to the signal amount, at least either the material of the sample or the shape of the sample is determined. |