| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10 |
| filingDate |
2021-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cdf63cae92e65bce025ee6f041657af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd92b42b2456df8925fcec9a3b638b91 |
| publicationDate |
2021-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210019477-A |
| titleOfInvention |
Yttrium fluoride spray powder and yttrium oxyfluoride film-forming component, and method for preparing them |
| abstract |
[Solution means] Y 5 O 4 F 7 and YF 3 are included, Y 5 O 4 F 7 and YF 3 are, Y 5 O 4 F 7 is 30 to 90% by mass, the balance is YF 3 , and the average particle diameter At least selected from YOF, Y 5 O 4 F 7 and Y 7 O 6 F 9 in the yttrium fluoride thermal sprayed material having a bulk density of 1.2 g/cm 3 or more and 2.5 g/cm 3 or less and 10 μm or more and 60 μm or less and A yttrium oxyfluoride film forming component formed by laminating a thermal sprayed film containing one type of yttrium oxyfluoride. [Effect] When the yttrium fluoride sprayed material of the present invention is plasma sprayed in air, a yttrium oxyfluoride sprayed coating can be obtained. |
| priorityDate |
2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |