http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210009278-A

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filingDate 2020-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6eee09c29d0165e85264ca30336445d6
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publicationDate 2021-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210009278-A
titleOfInvention METHOD FOR FORMING RuSi FILM AND SUBSTRATE PROCESSING SYSTEM
abstract The present invention provides a technique capable of forming a RuSi film having good step coverage. A method of forming a RuSi film according to an aspect of the present disclosure includes a step of supplying a silicon-containing gas to a substrate having a concave portion including an insulating film to adsorb silicon to the concave portion, and the concave portion to which the silicon is adsorbed. A precursor is supplied to form a Ru film in the concave portion, and a silicon-containing gas is supplied to the concave portion in which the Ru film is formed to form a RuSi film.
priorityDate 2019-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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