abstract |
As a cobalt electroplating composition, (a) cobalt ions, (b) ammonium compound of formula (NR 1 R 2 R 3 H + ) n X n- Including, In the formula R 1 , R 2 , R 3 are independently selected from H and linear or branched C 1 to C 6 alkyl, X is n is selected from inorganic or organic counterions, n is an integer selected from 1, 2 or 3, a cobalt electroplating composition. |