http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210002867-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff283c7d6797987f01db547f606e6b32 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D5-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-02 |
| filingDate | 2019-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_778091eca69773a6e3b7595d3eac9b7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfef6a2c9bfa836a5c8d46d15d55ebb6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3501526222a04d8d9f82f921439f665 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bfbdb2b700acbeaff0e91177c64c2c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7520109b776f231d3f85286849dcd56c |
| publicationDate | 2021-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20210002867-A |
| titleOfInvention | Manufacturing apparatus and method for parylene layer with real-time monitoring for thickness of parylene layer |
| abstract | The present invention relates to an apparatus and method for producing a parylene layer capable of real-time thickness monitoring. In more detail, it relates to an apparatus and method for manufacturing a parylene layer capable of real-time thickness monitoring that calculates the thickness of the deposited parylene layer using the impedance value of the parylene layer. The apparatus for manufacturing a parylene layer capable of real-time thickness monitoring according to the present invention includes a deposition chamber, a sensor unit disposed in the deposition chamber, and parylene deposited on the sensor unit in the deposition chamber through the sensor unit. Deposition based on information about the impedance of the parylene layer measured by the impedance analysis unit and the impedance analysis unit measuring the impedance of the parylene) layer, information about the reference thickness of the parylene layer stored in advance, and information about the reference impedance It may include an operation unit for calculating the thickness of the parylene layer. |
| priorityDate | 2019-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.