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filingDate 2020-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210001994-A
titleOfInvention Substrate treating liquid
abstract The substrate treatment liquid according to the present invention can be used to remove liquid on a substrate such as a semiconductor substrate having a patterned surface, and cyclohexanone oxime as a sublimable substance, alcohols, ketones, ethers, cycloalkanes And at least one solvent selected from the group consisting of water.
priorityDate 2019-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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