| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_77fa67c57a95554aea9651dee455eea8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D175-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D163-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D175-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D163-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D167-00 |
| filingDate |
2019-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8653f0c5af431920a95c4ea7ebd7a17f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c554286df5fdfbedfeb17bb6d74f1d97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66a6e5ffb0f24e3725cd8746886fb99f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a31aaa25e151c13e8663b7a4290d74d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0192d97aa46039a360c6e9d94d49aedd |
| publicationDate |
2020-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200143145-A |
| titleOfInvention |
Protected Organic-Inorganic hybrid Coating composition for dicing of Wafer and the Coating Material manufacturing thereof |
| abstract |
According to the organic-inorganic composite protective coating for wafer processing according to the present invention, by forming an organic-inorganic composite resin coating layer on the wafer surface, damage occurring on the wafer surface in the processing process including the cutting of the wafer during the semiconductor manufacturing process is fundamentally prevented. It is possible to prepare a protective coating that can increase stain resistance and adhesion. |
| priorityDate |
2019-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |