| abstract |
The chemical liquid purification device includes a tank body, a return tube, a liquid feed pump, a filtration device, and a pipe. The tank body has a liquid passage port and a circulation port communicating with the storage space in the tank body. The return tube has one end connected to the circulation port and the other end extending into the storage space. The liquid feed pump and filtering device are located outside the tank body between the liquid passage port and the circulation port. The piping connects the liquid feed pump and filtration device to the liquid passage port and circulation port. |