http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200121333-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e73e85175eb6d56814b3a170c816594a |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-16 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B9-041 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-44 |
filingDate | 2019-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64524b6bb1475dd0df7e2f9dc46f7d15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bd13415de4296654c965c152aae72d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e22ee4fada26e9b7607c763aa37b66a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d44cb622f330ca4cfca7bc3cd0b0de0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f061e5a454d003bf13120eeeb5465ae |
publicationDate | 2020-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20200121333-A |
titleOfInvention | Electroless palladium plating solution and palladium film |
abstract | In an electroless palladium plating solution using at least hydrazine as a reducing agent, it is excellent in bath stability and long-term stability in the acidic to neutral vicinity, and electroless palladium capable of suppressing a decrease in the deposition rate of the Pd film accompanying etching resist elution. Provide a plating solution. The electroless palladium plating solution of the present invention comprises a palladium compound, hydrazine or a salt thereof, a compound of formula (1) represented by the formula NH 2 NHCOR 1 or a salt thereof, and (NH 2 NHCO) 2 (R 2 )n. It contains at least one selected from the group consisting of the compound of formula (2) represented or a salt thereof, and satisfies pH 8 or less (wherein R 1 is H, NH 2 , an alkyl group having 1 to 10 carbon atoms , An alkoxy group having 1 to 10 carbon atoms, NHNH 2 , or an aromatic group, these may have a substituent, R 2 is (CH 2 ) or an aromatic group, these may have a substituent, and n is 0 to 10 Integer). |
priorityDate | 2018-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 86.