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filingDate 2020-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab2b97b9d1fa436b04ce987554b9b080
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publicationDate 2020-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200120528-A
titleOfInvention Cleaning liquid, and method of cleaning substrate provided with metal resist
abstract As a cleaning liquid used for cleaning a support with a metal resist, a cleaning liquid containing a solvent, an organic acid, and a compound (A) represented by the following general formula (a-1). [Formula 1] (In the formula, Ra 1 and Ra 2 are each independently an alkyl group having 1 to 3 carbon atoms).
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type http://data.epo.org/linked-data/def/patent/Publication

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