| abstract |
The Si-containing film-forming composition comprises a catalyst and/or polysilane, and an NH-free, C-free, and Si-rich perhydropolysilazane (the perhydropolysilazane has a molecular weight ranging from approximately 332 Daltons to approximately 100,000 Daltons. And the formula [-N(SiH 3 )x(SiH 2 -) y ] (where x+y=2 when x=0, 1, or 2, and y=0, 1, or 2; and x+ When y=3, x=0, 1 or 2, and an NH-free repeating unit having y=1, 2, or 3) are included. Also disclosed are synthetic methods and applications for using them. |