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publicationDate 2020-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200119668-A
titleOfInvention Etching composition for silicon nitride layer and etching process using the same
abstract Phosphorylated compounds; water; And a predetermined silane-based compound, or a reaction product thereof, or a combination thereof, and a composition for etching a silicon nitride film, and an etching method performed using the same.
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