http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200115016-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bdefb2fd5ee90279c4b06bcc558aa58e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02 |
| filingDate | 2019-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce13cf39ab1d0985ac9834acd34000ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ab146e28e7bd5e9d1e62a8f7c23f77f |
| publicationDate | 2020-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200115016-A |
| titleOfInvention | Ion source |
| abstract | An object of the present invention is to suppress abrasion of an electron emitting portion of a hot cathode due to positive ions. Plasma generating vessel 20, a hot cathode 30 disposed outside the plasma generating vessel 20 to emit electrons e toward the inside of the plasma generating vessel 20, and a plasma generating vessel 20 in the hot cathode 30 In the ion source 10 provided with an emitter power source Ee that applies a positive DC voltage to ), the electrons e are transmitted from the electron emitting portion 30a of the hot cathode 30 to the plasma generating vessel 20 In at least a partial region (R 1 ) of the region reaching the inside, an intersection to form a crossing electric field (E 1 ) that crosses the crossing direction (D) with the direction from the electron emitting portion 30a to the plasma generating vessel 20 It was set as the structure provided with the electric field forming element 40. |
| priorityDate | 2019-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.