| abstract |
Solid delivery precursors useful for volatilization to produce precursor vapors for deposition processes are described. The solid delivery precursor comprises a solid body of compressed particulate precursor in the form of, for example, pellets, platelets, tablets, beads, disks or monoliths. When used in a vapor deposition process such as chemical vapor deposition, pulsed chemical vapor deposition or atomic layer deposition, the solid transfer precursor in the form of a solid body of a compressed particulate precursor is substantially increased precursor vapor compared to the particulate precursor when applied to volatilization conditions. Provides flux. As a result, the deposition process can be performed in a shorter period of time, thereby achieving an increase in the manufacturing speed of products such as semiconductor products, flat panel displays, solar panels, LEDs, optical coatings and the like. |