Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-16 |
filingDate |
2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f02a2a66da89d96900d03ac58e43a1e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eea986bf96407cf0822e8973c3924fe5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a8f8b0bc2364ca6fe941973232b8a30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41b1f57cd45fff2149f4a1f1492eeb94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_841b885f991096829aa89e4d68781b45 |
publicationDate |
2020-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20200111781-A |
titleOfInvention |
Water-repellent protective film forming agent, chemical liquid for forming water-repellent protective film, and wafer surface treatment method |
abstract |
The present invention provides a novel water-repellent protective film forming agent or a novel water-repellent protective film-forming chemical solution for forming a water-repellent protective film on the surface of a wafer containing a silicon element, and the liquid-state agent or the surface of a wafer using the chemical liquid Provide a treatment method. The water-repellent protective film forming agent of the present invention is at least one silicon compound selected from the group consisting of a guanidine derivative represented by the following general formula [1] and an amidine derivative represented by the following general formula [2]. [Formula 9] [Formula 10] |
priorityDate |
2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |