| abstract |
The present invention relates to a sulfonic acid component selected from the group consisting of camphor sulfonic acid and benzenesulfonic acid of the following structure (I) wherein R is H or C-1 to C-18 n-alkyl; An oxalic acid component having the following structure (II); And a solvent component consisting essentially of an organic solvent component, or a mixture of an organic solvent component and water, wherein the organic solvent component consists of about 100% to about 85% by weight of the solvent component, and the organic solvent component is the solvent (III), (IV), (V), (VI) ( wherein, R represents - (- O-CH 2 -CH 2 -) n '-OH, -OH, and -OC (= O) - CH 3 is selected from the group consisting of, n'is 1, 2, 3, or 4), (VII) (wherein Ra is H or a C-1 to C-4 alkyl moiety), (VIII) , (IX) (wherein Rb is a C-1 to C-18 alkyl moiety), (X), and (XI) as a solvent component which is a mixture of at least two organic solvents selected from or selected from the group It relates to a composition consisting essentially of. Further, the present invention relates to the composition also containing a surfactant component, and also to a method of using any one of these compositions as a resist remover. . , Dipropylene glycol monomethyl ether (III), , , , And . |