http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200107298-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5419c6a346d6392ec4c450e378813ab9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 |
| filingDate | 2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a83bdd484996945639a6454d2d078b79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e054886c1f25017893de9f92ffeb974 |
| publicationDate | 2020-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200107298-A |
| titleOfInvention | Developer recycling system for negative photoresist |
| abstract | The present invention relates to a developer regeneration system for a negative photoresist, and more particularly, to a developer regeneration system for a negative photoresist that regenerates a developer waste recovered after a development process in semiconductor and display manufacturing. An embodiment of the developer regeneration system for a negative photoresist according to the present invention includes a developer waste recovery tank containing a developer waste solution recovered after a development process using a negative photoresist, and a photoresist contained in the developer waste solution contained in the developer waste recovery tank. An ultraviolet irradiation means for irradiating ultraviolet (UV) to the developing waste solution to agglomerate (photoresist), a developing waste inlet through which the developing waste containing the photoresist aggregated by the ultraviolet irradiation means flows, and the introduced developer waste And a developing waste filtration tank having an outlet of developing waste liquid formed therein, and a developing waste filtration filter installed in the developing waste filtration tank. |
| priorityDate | 2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.