| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b92609c425eaed9bfd02bb7a3a168c5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate |
2019-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ad43bd0cee30568b783cb639bfe971a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0b6374d8ebd3d72f52f519fed6a1e9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a915432340ad9b774619eb0203257b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d96844d93949a6422bb3b393750921b |
| publicationDate |
2020-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200099461-A |
| titleOfInvention |
Thin film sample piece creating method and charged particle beam device |
| abstract |
(Problem) A method for preparing a thin film sample piece and a charged particle beam device capable of suppressing defects in the thin film sample piece are provided. (Solution means) By processing the sample S by irradiating the focused ion beam FIB2 from the second direction intersecting the normal direction z of the surface of the sample S, the thin film sample piece 1 is prepared. In addition, the process of creating a connection part 3 which is disposed on one side of the thin film sample piece 1 in the thickness direction x and connects the thin film sample piece 1 to the sample S, and the normal direction z The process of rotating the sample S around the circumference, the process of connecting the needle holding the thin-film sample piece 1 to the thin-film sample piece 1, and the connection part 3 from the third direction intersecting the normal direction z ) Is irradiated with a focused ion beam (FIB3) to separate the thin film sample piece 1 from the sample S. |
| priorityDate |
2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |