| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B7-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2020-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd29ce2a02cf1be638eed2c2f9bebe09 |
| publicationDate |
2020-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200094669-A |
| titleOfInvention |
Cleaning sheet and carrying member with a cleaning function |
| abstract |
[PROBLEMS] Provided is a cleaning sheet excellent in foreign matter removal performance and heat resistance, which can be suitably used for a conveying member conveyed in a substrate processing apparatus. Further, there is provided a conveying member having a cleaning sheet and a conveying member having such a cleaning function and having excellent cleaning function and heat resistance. [Solution] The cleaning sheet of the present invention is a cleaning sheet having a cleaning layer, wherein the elastic modulus at 25°C of the cleaning layer is 0.5 GPa or more, and the elastic modulus at 200°C of the cleaning layer is 0.1 GPa or more. to be. |
| priorityDate |
2019-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |