| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J13-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J15-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K51-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J15-104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K1-465 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J13-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K51-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J15-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate |
2017-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ee1c90a3e7143287eed7a2d11b6f283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f096781c81b76acdec25d31dbf15f609
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d24c43c00601f38be64d111b369fb9b3 |
| publicationDate |
2020-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200087247-A |
| titleOfInvention |
Lock valve, vacuum chamber, and vacuum processing system for vacuum sealing |
| abstract |
A lock valve 100 for vacuum sealing is described. The lock valve 100 includes a base structure 110 having a valve opening 111, a shutter 140 for closing the valve opening 111, and a seal 160. The sealing portion includes a sealing base 161 connected to the base structure 110 and a sealing top portion 162 for providing a sealing contact with the shutter 140. The sealing base 161 has a higher strength than the sealing top 162. |
| priorityDate |
2017-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |