http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200083623-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67778 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67766 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67775 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2019-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37527e7b1861da75d3049f1386a20bd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00e8c5b3b338c042be336b247f77e5f2 |
| publicationDate | 2020-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200083623-A |
| titleOfInvention | Substrate transfer device and substrate transfer method |
| abstract | A substrate transport apparatus and a substrate transport method capable of reliably detecting that a substrate has been transferred to a predetermined position. The substrate transport apparatus includes a holding unit for holding a substrate, a reciprocating mechanism for reciprocating the holding unit with respect to a predetermined position, an optical sensor for forming a sensor area on a path through which the holding unit moves by the reciprocating mechanism, and a control unit It includes. The control unit determines the transfer abnormality in the transfer operation of the substrate. The transfer operation of the substrate includes a path operation in which the holding portion moves toward a predetermined position by the reciprocating mechanism, and a return operation in which the holding portion moves away from the predetermined position. In the transfer operation of the substrate, the control unit detects a first passing period in which the holding portion or the substrate held in the holding portion passes through the sensor area, and the first passing period is set to a preset first normal period. When it is different, it is judged as a conveyance abnormality. |
| priorityDate | 2018-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913 |
Total number of triples: 19.