| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2019-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2cec7e02a863cdf2432190b6a9586c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6cb902bd1824c97dc299adb694925ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97115381fe31035746c5fdeb52c07938
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_112b4d3a32d2de4f83515b62be7476d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db4b5cb018d52410b734e9c23095c424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9625e4aa7efcfb9868ccc2ddf858483a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87b67683476bfc99d6a4fd8bc7c40987 |
| publicationDate |
2020-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200083340-A |
| titleOfInvention |
Precursor For Forming A Thin Film, Method For Preparing Thereof, Method For Preparing The Thin Film, and The Thin Film |
| abstract |
The present invention relates to a precursor for forming a thin film, a method for manufacturing the same, a method for manufacturing a thin film using the same, and a thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112409390-A |
| priorityDate |
2018-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |