| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6b149ea1849da2de91fd17cd1a239c5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-568 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-02 |
| filingDate |
2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_038e5dfa56bfc2841770493c69ced162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fffc07a6f80933c5bb61a37fd60f7b67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e5c34f15663687341b7be021766a69d |
| publicationDate |
2020-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200079815-A |
| titleOfInvention |
Thin layers deposition apparatus and methode the same |
| abstract |
A thin film deposition apparatus is disclosed. The thin film deposition apparatus according to the present invention is connected to a process chamber in which a deposition process for a substrate is performed, transfers the substrate to the process chamber, and includes a transfer chamber having a substrate holder portion supporting the substrate and a temperature of the substrate connected to the transfer chamber It includes a temperature information acquisition unit for obtaining information about, and a temperature control unit provided inside the transfer chamber to control the temperature of the substrate. |
| priorityDate |
2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |