| abstract |
Nanopowders contain nanoparticles with core particles with a thin film coating. The core particles and thin film coatings are independently formed from at least one of rare earth metal-containing oxides, rare earth metal-containing fluorides, rare earth metal-containing oxyfluorides, or combinations thereof. The thin film coating can be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed of nanopowders, and methods of making and using nanopowders. |