http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200068782-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55a854abe5a37b075d9a25a1cfcb46eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_665a1ccbeb11cc1bcdd3c4d078d4e3f0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-38 |
| filingDate | 2018-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5753747c3622df5a2d5e96628877164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb2136a7747963a918337c307bdfcea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dce0239acef085187d3a810e63442607 |
| publicationDate | 2020-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200068782-A |
| titleOfInvention | A probe for atomic force microscopy, and a method for manufacturing the same |
| abstract | The present invention relates to a probe for an atomic force microscope and a method for manufacturing the same, wherein the probe for an atomic force microscope includes a probe tip, and a coating layer located on the surface of the probe tip and comprising metal silicide. Since the probe for the atomic force microscope does not interfere with the flow of current due to a Schottky barrier when measuring a semiconductor sample, it is possible to greatly increase the accuracy and reliability of the electrical conductivity measurement of the semiconductor surface. In addition, the probe for the atomic force microscope may further improve resolution and reliability when measuring electrical conductivity of a semiconductor surface as it includes a much sharper and more crystalline tip. |
| priorityDate | 2018-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.