| abstract |
LogP containing a base component (A) whose solubility in a developer changes by the action of an acid, and a compound (D0) composed of an anion portion and a cation portion represented by the general formula (d0), and the cation portion of the compound (D0) A resist composition having a value of less than 7.7. In the formula, M m+ represents an m-valent organic cation. R d0 is a substituent. p is an integer of 0-3. q is an integer of 0-3. n is an integer of 2 or more. However, n + p ≤ (q × 2) + 5. [Formula 1] |