| abstract |
The present invention relates to a thin-film power source that is in a solid state, and more specifically, micro-electro harvesting, ultra-light energy storage solutions and medical device fields, as well as IoT, micro-sensor, MEMS, microfluidic chip elements , A thin film pseudocapacitor having a solid inorganic Li + -ion conductive electrolyte, intended for micro devices such as RFID tags and the like. The power source is a substrate; Two current collector layers; Two buffer / cache layers; A solid electrolyte layer; A protective layer, each of the two buffer / cache layers being a layer of Li X M Y O 3 and M being any one of Nb, Ta, Ti, V; X ranges from 0.8 to 1.4; Y is in the range of 1.2 to 0.6. |