| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5157cc9d29989d27bd65a85902ddb054 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0052 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-0971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-036 |
| filingDate |
2018-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c05720cd73197d02340d5f4c1e7e0334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8d96e8e6fc756fb54f7566b2dfae692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6680b16c5eee03c6ed9e004409a9e428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dfd49969e552290bcccf1bc36c0073b |
| publicationDate |
2020-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200044901-A |
| titleOfInvention |
Fluorine detection method in gas discharge light source |
| abstract |
The apparatus includes a gas maintenance system having a gas supply system fluidly connected to one or more gas discharge chambers; A detection device fluidly connected to each gas discharge chamber; And a control system connected to the gas maintenance system and the detection device. The detection device is a container for forming a reaction cavity containing a metal oxide, the reaction cavity being fluidly connected to the gas discharge chamber to receive a mixed gas containing fluorine from the gas discharge chamber in the reaction cavity, and the container is received A container, which enables a reaction between the fluorine and the metal oxide in the mixed gas to form a new gas mixture containing oxygen; And an oxygen sensor fluidly connected to the new gas mixture to sense the amount of oxygen in the new gas mixture. The control system is configured to estimate the fluorine concentration in the mixed gas received. |
| priorityDate |
2017-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |