http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200029259-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e4790c814adc8c5a88802341d396009 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02606 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2018-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_127bb952df402616254dde3aa145135e |
| publicationDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200029259-A |
| titleOfInvention | Method of forming patterned nanogap and patterned nanogap thereof |
| abstract | The present invention relates to a method for forming a nanogap by patterning and a patterned nanogap formed using the same. Specifically, the present invention relates to a method for patterning a nano-sized gap. According to the present invention, spatial control is possible in forming a nanogap between the substrate and the metal particles by adsorbing the metal particles only where desired using a simple method of patterned mask and ultraviolet irradiation. In addition, it is also possible to pattern a very small size of nanometer scale using a photolithography process. By controlling the patterning of the nanogap, it is possible to ultimately control the spatial distribution of the nanogap, thereby controlling various optical properties or phenomena. |
| priorityDate | 2018-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.