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filingDate 2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_516ff5f4a4c116b6712487640f271808
publicationDate 2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200026871-A
titleOfInvention Infrared processing unit
abstract An infrared ray processing apparatus includes a heating element and a metamaterial structure capable of emitting infrared rays having a maximum peak of a non-Planck distribution when the thermal energy is input from the heating element, and having a peak wavelength of the maximum peak of 2 µm or more and 7 µm or less. And an inner tube surrounding the infrared heater, including at least one of a fluorine-based material and a calcium fluoride having a CF bond, and transmitting infrared rays of the peak wavelength, and surrounding the inner tube. It has the external appearance which forms the object flow path which a process target can distribute | circulate in between.
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Total number of triples: 31.