http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200021672-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed65c0ae1bfc25c337b7743805e9fe01 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32119 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2018-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c51f1e3a2fad5069e29d5a4383c8ef1 |
| publicationDate | 2020-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200021672-A |
| titleOfInvention | Apparatus and Method for Processing Substrate |
| abstract | A substrate processing apparatus according to an embodiment of the present invention is provided with a processing chamber for receiving a substrate, an antenna disposed to face the substrate to be accommodated in the processing chamber, and between the antenna and the processing chamber, and having a transition on at least one surface. It includes a window in which a layer containing a metal oxide is formed. |
| priorityDate | 2018-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.