| abstract |
When the film is formed together with the photoacid generator, the film is formed into a water repellency after film formation and becomes hydrophilic by acid upon irradiation with light, and contains no perfluoroalkyl group having 4 or more carbon atoms giving high sensitivity and high resolution patterns. Does not provide a fluorine-containing polymer. The fluorine-containing polymer of the present invention is characterized by including a repeating unit represented by formula (1). (Wherein R 1 is a hydrogen atom, a fluorine atom or an alkyl group having 1 to 10 carbon atoms, R 2 to R 5 are a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, X is a single bond or a divalent group, and Y is A C1-C3 fluorine-containing alkyl group or a carboxylic acid ester group (-COOR), R is a C1-C3 fluorine-containing alkyl group, and seven or less hydrogen atoms contained in these groups may be substituted by a fluorine atom. .) |