http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190142961-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_050fc7b82c5d17d9aeb63a7cdcc546b3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-014 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-18 |
| filingDate | 2018-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5477ba414d033116593820d6391e772 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fbfbe83e2c40dff392b528610af71de |
| publicationDate | 2019-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190142961-A |
| titleOfInvention | Micro heater capable of sensing a temperature of the micro heater, method of fabricating the micro heater and method of driving the micro heater |
| abstract | The present invention relates to a micro heater capable of temperature measurement and temperature control. The micro heater comprises: a substrate having a plurality of air layers etched from an upper surface to have a predetermined depth, and a plurality of supports left unetched between the air layers; An insulating film formed on the upper surface of the substrate; A resistance pattern formed on an upper surface of the insulating film; Electrode terminals formed at both ends of the resistance pattern; And an air layer of the substrate is disposed below the resistance pattern. The resistance pattern is made of polysilicon implanted with a high concentration of p-type impurities, and is driven by a temperature sensor by applying a low driving voltage to an electrode terminal connected to the resistance pattern or by driving a micro heater by applying a high driving voltage to the electrode terminal. You can. The micro heater according to the present invention has a polysilicon resistance pattern in which a high concentration of p-type impurities are injected to selectively drive one of the temperature sensor and the micro heater according to the driving voltage, and to allow the temperature measurement and temperature control of the micro heater. Characterized in that configured. |
| priorityDate | 2018-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.