| abstract |
The resist composition containing the compound represented by general formula (bd1-1), (bd1-2), or (bd1-3). The formula, Rx 1 Rx ~ 4 is shown a hydrocarbon group or a hydrogen atom, or the mutual combination may form a ring structure. Ry 1 to Ry 2 may represent a hydrocarbon group or a hydrogen atom or may be bonded to each other to form a ring structure. Rz 1 to Rz 4 may represent a hydrocarbon group or a hydrogen atom or may be bonded to each other to form a ring structure. At least one of Rx 1 to Rx 4 , Ry 1 to Ry 2, and Rz 1 to Rz 4 has an anion group. M 1 m + represents a sulfonium cation having a sulfonyl group. R 001 to R 003 each independently represent a monovalent organic group. However, at least one of R 001 to R 003 is an organic group having an acid dissociable group. M 3 m + represents an m-valent organic cation having an electron withdrawing group. [Formula 1] |