| abstract |
The present invention provides a method for setting pattern data corresponding to a wire grid structure of a wire grid polarizer, manufacturing and obtaining a metal ion solution, dipping at least one surface of the carrier substrate in a metal ion solution, and using a carrier using a carrier device. Firing an electron beam towards the substrate and controlling the electron beam motion based on the pattern data, thereby depositing a metal at a location past the electron beam on the carrier substrate to form a wire grid structure, the manufacture of a wire grid polarizer comprising The method is disclosed. |