http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190131038-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a37d7a7385924dd55e29ac1e96d1492 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate | 2017-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c3e06964e48c0bc69fd775b5153c9db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3391f45f13e8090a107bb8313f3aa62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dae21268244bd24c7741c0a7c3892940 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31524ef866e75ce0bc9274fbcd4d5be6 |
| publicationDate | 2019-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190131038-A |
| titleOfInvention | Split Sputtering Target |
| abstract | The split sputtering target 1 which concerns on one aspect of embodiment is the split sputtering target 1 formed by joining the several target material 10 to the base material 20, and the several target material 10 makes a space | interval. The flat surface 12 is each formed in at least one part of the side surface 11 of the pair of target material 10 arrange | positioned at least one part of the division part 40 formed by being arrange | positioned, The space | interval between the flat surfaces 12 which opposes in the division part 40 is larger than the space | interval Lb of the part closest to the base material 20, and the space | interval Lt of the part which is furthest from the base material 20 is larger, and is flat. Surface roughness Ra of the surface 12 is 0.3 micrometer or less. |
| priorityDate | 2017-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.