| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_af4cc10d515454e59278de7445531247 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2018-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb9aa27cc501813c7d3701b605b35afb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c645f76c73f189c8b975443460869f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6eef80bed481e15c5f0cbe15da8abc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1039e3fe7257c42e926d800be9899dc6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_813f07d22beba37f47c14286542d8d6b |
| publicationDate |
2019-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190116384-A |
| titleOfInvention |
Methods for Evaluating Semiconductor Structures |
| abstract |
Methods are disclosed for evaluating the quality of a semiconductor structure having a charge trapping layer (CTL), for example, to determine if the semiconductor structure is suitable for use as a radiofrequency device. Embodiments of the evaluation method may include measuring an electrostatic parameter in an initial state and an excited state in which charge carriers are generated. |
| priorityDate |
2017-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |