| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2d9fd632e7ef936d0d33e7b9b5f018c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0634db21dadafbd3bf373cecf8430027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a6c398d777cf6c3a9a77923d0d7a9f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6c70f21f9d52e115043adb816e48aea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cda5e4629bbf33029a423746c63899b4 |
| publicationDate |
2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190114552-A |
| titleOfInvention |
Thin film transistor and manufacturing method thereof |
| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a thin film transistor, and more particularly, to oxidize an interface between an oxide semiconductor layer (active layer) and a gate electrode patterned through heat treatment without using a deposition method or a solution process method for a gate insulating film. The present invention relates to a method for manufacturing a thin film transistor, which enables ultra-thin insulating films to be formed and can significantly reduce manufacturing costs by simplifying the insulating film forming process. |
| priorityDate |
2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |