| abstract |
SiC sintered body, the sintered body contains a nitrogen atom, R max / R ave which is the ratio of the maximum volume resistivity R max of the sintered compact and the average volume resistivity R ave of the sintered compact is 1.5 or less, and the minimum volume resistivity R min of the sintered compact The SiC sintered compact whose Rmin / R ave which is a ratio of the said average volume resistivity R ave is 0.7 or more, and the relative density of the said sintered compact is 98% or more. |