| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate |
2018-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e4ad6ccff497e0948e8315bf7d97e62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb694bb6869eb550914f6f0480e80a66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b48f98a1138331e24eeda1df1a97fcd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_983e04fd21f7236969e90b4c0113ad50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d15e097e66c0fa6ea4c0e2bea00de1d |
| publicationDate |
2019-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190112093-A |
| titleOfInvention |
Substrate processing method and substrate processing apparatus |
| abstract |
A substrate processing method for removing resist from a surface of a substrate includes a support step of allowing the support member to horizontally support the substrate, and a mixed gas supply step of supplying a mixed gas of water vapor and ozone gas to the vicinity of the surface of the substrate. (T4) and the ultraviolet irradiation process (T6) which irradiates an ultraviolet-ray to the mixed gas supplied near the surface of the said board | substrate. |
| priorityDate |
2017-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |